The influence of methane/argon plasma composition on the formation of the hydrogenated amorphous carbon films

Hsin Hung Chen, Jiunn Der Liao, Chih Chiang Weng, Jui Fu Hsieh, Chia Wei Chang, Chao Hsien Lin, Ting Pin Cho

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2 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds