The influence of Mg doped ZnO thin films on the properties of Love wave sensors

Ren Chuan Chang, Sheng Yuan Chu, Po Wen Yeh, Cheng Shong Hong, Po Ching Kao, Yi Jen Huang

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

The influence of Mg dopants on the crystalline structures of MZO thin films and the properties of Love wave sensors has been studied in this paper. 0-20 mol% Mg doped ZnO films with c-axis preferred orientation were deposited on the 64° YX-LiNbO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. The phase shift and temperature coefficient of frequency of Love wave devices in MZO/LiNbO3 structures are presented. The appropriate addition of Mg dopant will produce a rough surface to raise the sensitivity. Besides, the effects of reflector gratings on the properties of Love wave sensors are also investigated.

Original languageEnglish
Pages (from-to)290-295
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume132
Issue number1
DOIs
Publication statusPublished - 2008 May 28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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