The influence of Mg doped ZnO thin films on the properties of Love wave sensors

Ren Chuan Chang; Sheng Yuan Chu; Po Wen Yeh; Cheng Shong Hong; Po Ching Kao; Yi Jen Huang

doi:10.1016/j.snb.2008.01.038

The influence of Mg doped ZnO thin films on the properties of Love wave sensors

Ren Chuan Chang, Sheng Yuan Chu, Po Wen Yeh, Cheng Shong Hong, Po Ching Kao, Yi Jen Huang

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

The influence of Mg dopants on the crystalline structures of MZO thin films and the properties of Love wave sensors has been studied in this paper. 0-20 mol% Mg doped ZnO films with c-axis preferred orientation were deposited on the 64° YX-LiNbO₃ substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. The phase shift and temperature coefficient of frequency of Love wave devices in MZO/LiNbO₃ structures are presented. The appropriate addition of Mg dopant will produce a rough surface to raise the sensitivity. Besides, the effects of reflector gratings on the properties of Love wave sensors are also investigated.

Original language	English
Pages (from-to)	290-295
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	132
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2008.01.038
Publication status	Published - 2008 May 28

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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abstract = "The influence of Mg dopants on the crystalline structures of MZO thin films and the properties of Love wave sensors has been studied in this paper. 0-20 mol% Mg doped ZnO films with c-axis preferred orientation were deposited on the 64° YX-LiNbO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. The phase shift and temperature coefficient of frequency of Love wave devices in MZO/LiNbO3 structures are presented. The appropriate addition of Mg dopant will produce a rough surface to raise the sensitivity. Besides, the effects of reflector gratings on the properties of Love wave sensors are also investigated.",

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AU - Chang, Ren Chuan

AU - Chu, Sheng Yuan

AU - Yeh, Po Wen

AU - Hong, Cheng Shong

AU - Kao, Po Ching

AU - Huang, Yi Jen

PY - 2008/5/28

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AB - The influence of Mg dopants on the crystalline structures of MZO thin films and the properties of Love wave sensors has been studied in this paper. 0-20 mol% Mg doped ZnO films with c-axis preferred orientation were deposited on the 64° YX-LiNbO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. The phase shift and temperature coefficient of frequency of Love wave devices in MZO/LiNbO3 structures are presented. The appropriate addition of Mg dopant will produce a rough surface to raise the sensitivity. Besides, the effects of reflector gratings on the properties of Love wave sensors are also investigated.

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