The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition

Chien Hung Wu; Kow-Ming Chang; Yi-Ming Chen; Bo Wen Huang; Yu Xin Zhang; Shui-Jinn Wang; Jui-Mei Hsu

The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition

Chien Hung Wu, Kow-Ming Chang, Yi-Ming Chen, Bo Wen Huang, Yu Xin Zhang, Shui-Jinn Wang, Jui-Mei Hsu

Institute of Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	The 14th International Conference on Nano Science and Nano Technology
Place of Publication	Mokpo, Korea
Publication status	Published - 2016 Nov 10

Cite this

@inproceedings{55465d4586c64156b9e6776979858af2,

title = "The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition",

author = "Wu, {Chien Hung} and Kow-Ming Chang and Yi-Ming Chen and Huang, {Bo Wen} and Zhang, {Yu Xin} and Shui-Jinn Wang and Jui-Mei Hsu",

year = "2016",

month = nov,

day = "10",

language = "English",

booktitle = "The 14th International Conference on Nano Science and Nano Technology",

}

The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition. / Wu, Chien Hung; Chang, Kow-Ming; Chen, Yi-Ming et al.
The 14th International Conference on Nano Science and Nano Technology. Mokpo, Korea, 2016.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - The Investigation of Gate-Stacked In-Ga-Zn-O TFTs with Ga-Zn-O Source/Drain Electrodes by Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition

AU - Wu, Chien Hung

AU - Chang, Kow-Ming

AU - Chen, Yi-Ming

AU - Huang, Bo Wen

AU - Zhang, Yu Xin

AU - Wang, Shui-Jinn

AU - Hsu, Jui-Mei

PY - 2016/11/10

Y1 - 2016/11/10

M3 - Conference contribution

BT - The 14th International Conference on Nano Science and Nano Technology

CY - Mokpo, Korea

ER -