The Performance Improvement of LaAlO3/ZrO2/IGZO-TFTs with AP-PECVD by KrF Excimer Laser Annealing

Chien Hung Wu, Bo Wen Huang, Kow Ming Chang, Shui-Jinn Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 28th International Microprocesses and Nanotechnology Conference
Place of PublicationToyama, Japan
Publication statusPublished - 2015 Nov 10

Cite this

Wu, C. H., Huang, B. W., Chang, K. M., & Wang, S-J. (2015). The Performance Improvement of LaAlO3/ZrO2/IGZO-TFTs with AP-PECVD by KrF Excimer Laser Annealing. In The 28th International Microprocesses and Nanotechnology Conference