The Performance Improvement of LaAlO3/ZrO2/IGZO-TFTs with AP-PECVD by KrF Excimer Laser Annealing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	The 28th International Microprocesses and Nanotechnology Conference
Place of Publication	Toyama, Japan
Publication status	Published - 2015 Nov 10

Cite this

@inproceedings{dbb4610cb2124dd4950e24ccbf6e3852,

title = "The Performance Improvement of LaAlO3/ZrO2/IGZO-TFTs with AP-PECVD by KrF Excimer Laser Annealing",

author = "Wu, \{Chien Hung\} and Huang, \{Bo Wen\} and Chang, \{Kow Ming\} and Shui-Jinn Wang",

year = "2015",

month = nov,

day = "10",

language = "English",

booktitle = "The 28th International Microprocesses and Nanotechnology Conference",

}