The Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow-velocity measurement

Keyphrases

• Flow around 100%
• Operating Principle 100%
• Capacitive Sensor 100%
• Micro Flow Sensor 100%
• Prandtl 100%
• Sensor Operation 100%
• Silicon Diaphragm 100%
• Flow Velocity Measurement 100%
• Fabrication Methods 50%
• Pressure Difference 50%
• Deflection 50%
• Counter Electrode 50%
• Flow Velocity 50%
• Wind Tunnel Experiment 50%
• Novel Types 50%
• Static Pressure 50%
• Fluid Pressure 50%
• CFD Simulation 50%
• Integrated Capacitor 50%
• Velocity Detection 50%
• Flow Velocity Sensor 50%
• Setup Operations 50%

Engineering

• Flow Velocity 100%
• Flow Sensor 100%
• Diaphragm 100%
• Capacitive 100%
• Operation Principle 66%
• Computational Fluid Dynamics 33%
• Tunnel 33%
• Pressure Difference 33%
• Static Pressure 33%
• Fluid Pressure 33%
• Main Parameter 33%
• Prandtl Tube 33%