The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere

D. R. Sahu; Jow Lay Huang

doi:10.1016/j.tsf.2007.06.124

The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere

D. R. Sahu, Jow Lay Huang

Research output: Contribution to journal › Article › peer-review

80 Citations (Scopus)

Abstract

ZnO/Cu/ZnO multilayers were prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. The influence of post growth annealing on the structural, electrical and optical properties of the multilayer was investigated. The experimental results show that the properties of the multilayers are improved with post annealing in vacuum and deteoriated in air, nitrogen or oxygen atmospheres. X-ray diffraction measurement indicated that the multilayers are c-axis oriented similar to ZnO wurzite structure. The multilayers heat treated up to 200 °C under vacuum maintained a transmittance over 85% and sheet resistance about 9.46 Ω/sq which further increases with increase of the annealing temperature.

Original language	English
Pages (from-to)	208-211
Number of pages	4
Journal	Thin Solid Films
Volume	516
Issue number	2-4
DOIs	https://doi.org/10.1016/j.tsf.2007.06.124
Publication status	Published - 2007 Dec 3

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2007.06.124

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title = "The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere",

abstract = "ZnO/Cu/ZnO multilayers were prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. The influence of post growth annealing on the structural, electrical and optical properties of the multilayer was investigated. The experimental results show that the properties of the multilayers are improved with post annealing in vacuum and deteoriated in air, nitrogen or oxygen atmospheres. X-ray diffraction measurement indicated that the multilayers are c-axis oriented similar to ZnO wurzite structure. The multilayers heat treated up to 200 °C under vacuum maintained a transmittance over 85% and sheet resistance about 9.46 Ω/sq which further increases with increase of the annealing temperature.",

author = "Sahu, {D. R.} and Huang, {Jow Lay}",

note = "Funding Information: The author would like to thank the National Science Council of the ROC for its financial support under contract no. NSC-95-2120-M-006-001 and NCKU project of promoting Academic Excellence and Developing World Class Research centers: D96-2700.",

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T1 - The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere

AU - Sahu, D. R.

AU - Huang, Jow Lay

N1 - Funding Information: The author would like to thank the National Science Council of the ROC for its financial support under contract no. NSC-95-2120-M-006-001 and NCKU project of promoting Academic Excellence and Developing World Class Research centers: D96-2700.

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Y1 - 2007/12/3

N2 - ZnO/Cu/ZnO multilayers were prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. The influence of post growth annealing on the structural, electrical and optical properties of the multilayer was investigated. The experimental results show that the properties of the multilayers are improved with post annealing in vacuum and deteoriated in air, nitrogen or oxygen atmospheres. X-ray diffraction measurement indicated that the multilayers are c-axis oriented similar to ZnO wurzite structure. The multilayers heat treated up to 200 °C under vacuum maintained a transmittance over 85% and sheet resistance about 9.46 Ω/sq which further increases with increase of the annealing temperature.

AB - ZnO/Cu/ZnO multilayers were prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. The influence of post growth annealing on the structural, electrical and optical properties of the multilayer was investigated. The experimental results show that the properties of the multilayers are improved with post annealing in vacuum and deteoriated in air, nitrogen or oxygen atmospheres. X-ray diffraction measurement indicated that the multilayers are c-axis oriented similar to ZnO wurzite structure. The multilayers heat treated up to 200 °C under vacuum maintained a transmittance over 85% and sheet resistance about 9.46 Ω/sq which further increases with increase of the annealing temperature.

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The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere

Abstract

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