The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere

D. R. Sahu, Jow Lay Huang

Research output: Contribution to journalArticlepeer-review

69 Citations (Scopus)

Abstract

ZnO/Cu/ZnO multilayers were prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. The influence of post growth annealing on the structural, electrical and optical properties of the multilayer was investigated. The experimental results show that the properties of the multilayers are improved with post annealing in vacuum and deteoriated in air, nitrogen or oxygen atmospheres. X-ray diffraction measurement indicated that the multilayers are c-axis oriented similar to ZnO wurzite structure. The multilayers heat treated up to 200 °C under vacuum maintained a transmittance over 85% and sheet resistance about 9.46 Ω/sq which further increases with increase of the annealing temperature.

Original languageEnglish
Pages (from-to)208-211
Number of pages4
JournalThin Solid Films
Volume516
Issue number2-4
DOIs
Publication statusPublished - 2007 Dec 3

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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