The resonance characteristics of solidly mounted resonators with 1/2 λ and 1/4 λ configurations

Ching Liang Wei, Ying Chung Chen, Chien Chuan Cheng, Chih Ming Wang, Kuo Sheng Kao, Po-Tsung Hsieh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The solidly mounted resonator (SMR) is composed of a piezoelectric AlN thin film sandwiched between two electrodes and a Bragg reflector consisting of alternating high and low acoustic impedance layers of quarter-wavelength thickness. According to the different arrangements of high and low acoustic impedance layers, SMR devices form two resonance modes, i.e. 1/2 λ and 1/4 λ mode configurations. The purpose of this study is to compare the resonance characteristics of these two configurations. The thickness of the piezoelectric layer for 1/4 λ, mode configuration is set equal to a half of that for 1/2 λ mode configuration. Therefore, the piezoelectric thin film for 1/2 λ mode configuration exhibits better crystallization owing to its film thickness. It leads to a high coupling coefficient, k2, and a wide bandwidth if piezoelectric thin film is fabricated with good crystalline characteristics. As to 1/4 λ mode configuration with moderate film thickness, it has a better surface smoothness and a lower stress resulting in a slight scattering of the acoustic wave. As a result, the SMR device with 1/4 λ mode configuration leads to a high quality factor. The return loss outside passband is obviously close to zero for the 1/4 λ mode configuration.

Original languageEnglish
Title of host publication2008 IEEE International Frequency Control Symposium, FCS
Pages209-212
Number of pages4
DOIs
Publication statusPublished - 2008 Nov 13
Event2008 IEEE International Frequency Control Symposium, FCS - Honolulu, HI, United States
Duration: 2008 May 192008 May 21

Publication series

Name2008 IEEE International Frequency Control Symposium, FCS

Conference

Conference2008 IEEE International Frequency Control Symposium, FCS
CountryUnited States
CityHonolulu, HI
Period08-05-1908-05-21

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Wei, C. L., Chen, Y. C., Cheng, C. C., Wang, C. M., Kao, K. S., & Hsieh, P-T. (2008). The resonance characteristics of solidly mounted resonators with 1/2 λ and 1/4 λ configurations. In 2008 IEEE International Frequency Control Symposium, FCS (pp. 209-212). [4622991] (2008 IEEE International Frequency Control Symposium, FCS). https://doi.org/10.1109/FREQ.2008.4622991