TY - GEN
T1 - The structural and optical properties of zinc oxide thin films deposited on PET substrate by r.f. magnetron sputtering
AU - Lu, Yang Ming
AU - Tsai, Shu Yi
AU - Lu, Jeng Jong
AU - Hon, Min Hsiung
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2007
Y1 - 2007
N2 - The transparent conducting films have been investigated extensively because of their excellent electrical and optical properties in many applications. For producing the LCD (Liquid Crystal Displays) and OLED (Organic Light-Emitting Diode), the transparent conductive films are mainly deposited on the glass. Using the plastic substrate has the advantages of low cost, light-weighted, and flexible characteristics; it is considered as the candidate substrate material for the portable and flexible LCD. The surface roughness measured by AFM was in the range 2.63-11.1 nm. The result shows that the crystallite size increases with increasing the r.f. power. The microstructure of ZnO film has a proud (002) orientation. The average transmittance of ZnO film can be obtained over 80% in the visible spectrum. The lowest resistivity obtained is 4.0×10-3 ohm-cm. The adhesion between ZnO films and PET substrate is good because there is no separate observed in this study.
AB - The transparent conducting films have been investigated extensively because of their excellent electrical and optical properties in many applications. For producing the LCD (Liquid Crystal Displays) and OLED (Organic Light-Emitting Diode), the transparent conductive films are mainly deposited on the glass. Using the plastic substrate has the advantages of low cost, light-weighted, and flexible characteristics; it is considered as the candidate substrate material for the portable and flexible LCD. The surface roughness measured by AFM was in the range 2.63-11.1 nm. The result shows that the crystallite size increases with increasing the r.f. power. The microstructure of ZnO film has a proud (002) orientation. The average transmittance of ZnO film can be obtained over 80% in the visible spectrum. The lowest resistivity obtained is 4.0×10-3 ohm-cm. The adhesion between ZnO films and PET substrate is good because there is no separate observed in this study.
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U2 - 10.4028/3-908451-30-2.971
DO - 10.4028/3-908451-30-2.971
M3 - Conference contribution
AN - SCOPUS:38549172777
SN - 3908451302
SN - 9783908451303
T3 - Solid State Phenomena
SP - 971
EP - 974
BT - Nanoscience and Technology
PB - Trans Tech Publications Ltd
T2 - China International Conference on Nanoscience and Technology, ChinaNANO 2005
Y2 - 9 June 2005 through 11 June 2005
ER -