TY - GEN
T1 - The study of flexible plate wave device for micro pumping system
AU - Tsai, Min Chien
AU - Leu, Tzong Shyng
PY - 2007
Y1 - 2007
N2 - This paper investigates on micro pumping system, flow field generated by an traveling wave boundary layer, which model is developed for flexural plate wave (FPW) device numerically. In the study, the steady state solution of a FPW pump is most concerned. The velocity profiles and net flow rate for different parameters including frequency, channel height, and wave length are investigated. In this device, it is found that flow field remains periodic. The time averaged velocity profiles over one period become a parabolic velocity profile when the channel height is less than 100μm. When a channel height is higher than 200μm, the time averaged velocity profiles deviate from parabolic velocity profile to a wall-jet type velocity profile. This finding is different from previous study. The acoustic pressure can influence as high as 100 μm channel height. The pressure wave confinement effect in a microchannel with height less than 100 μm is noticed. This research also finds that the flow rate of FPW pump can be controlled by the frequency.
AB - This paper investigates on micro pumping system, flow field generated by an traveling wave boundary layer, which model is developed for flexural plate wave (FPW) device numerically. In the study, the steady state solution of a FPW pump is most concerned. The velocity profiles and net flow rate for different parameters including frequency, channel height, and wave length are investigated. In this device, it is found that flow field remains periodic. The time averaged velocity profiles over one period become a parabolic velocity profile when the channel height is less than 100μm. When a channel height is higher than 200μm, the time averaged velocity profiles deviate from parabolic velocity profile to a wall-jet type velocity profile. This finding is different from previous study. The acoustic pressure can influence as high as 100 μm channel height. The pressure wave confinement effect in a microchannel with height less than 100 μm is noticed. This research also finds that the flow rate of FPW pump can be controlled by the frequency.
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U2 - 10.1109/NEMS.2007.352057
DO - 10.1109/NEMS.2007.352057
M3 - Conference contribution
AN - SCOPUS:34548132793
SN - 1424406102
SN - 9781424406104
T3 - Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
SP - 452
EP - 457
BT - Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
T2 - 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Y2 - 16 January 2007 through 19 January 2007
ER -