TY - JOUR
T1 - The study of humidity sensor based on Li-doped ZnO nanorods by hydrothermal method
AU - Chou, Chun Chi
AU - Shih, Li Hsing
AU - Chang, Shoou Jinn
N1 - Publisher Copyright:
© 2020, Springer-Verlag GmbH Germany, part of Springer Nature.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020
Y1 - 2020
N2 - In this study, we report the one-dimension Li doped ZnO nanorods (NRs) on glass substrates with hydrothermal method, and the fabrication of Li doped ZnO NRs humidity sensors. It was found that the as-grown Li doped ZnO NRs were structurally evenly with a wurtzite structure. The relative humidity (RH) effect factor was found to be dependent on the ultraviolet (UV) illumination of humidity sensors with a nanostructure. During UV illumination, it was also found that photocurrent to dark current contrast ratios were approximately 17.6 and 14.5, when measured with RHs of 30 and 80%, respectively, at 5.0 V applied bias. The competitive surface effects of a great quantity oxygen/water to explain the observed variations in UV photodetector under different relative humidity conditions.
AB - In this study, we report the one-dimension Li doped ZnO nanorods (NRs) on glass substrates with hydrothermal method, and the fabrication of Li doped ZnO NRs humidity sensors. It was found that the as-grown Li doped ZnO NRs were structurally evenly with a wurtzite structure. The relative humidity (RH) effect factor was found to be dependent on the ultraviolet (UV) illumination of humidity sensors with a nanostructure. During UV illumination, it was also found that photocurrent to dark current contrast ratios were approximately 17.6 and 14.5, when measured with RHs of 30 and 80%, respectively, at 5.0 V applied bias. The competitive surface effects of a great quantity oxygen/water to explain the observed variations in UV photodetector under different relative humidity conditions.
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U2 - 10.1007/s00542-020-04957-9
DO - 10.1007/s00542-020-04957-9
M3 - Article
AN - SCOPUS:85088873534
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
ER -