The tribological properties of Zr/a-C:Zr/Zr-C:H-x films with various pulsed-direct current power frequency sliding against various normal loading

W. H. Kao, Yean-Liang Su, J. H. Horng, S. H. Yao, H. C. Huang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this research, Zr/a-C:Zr/Zr-C:H-x films with various pulsed-direct current power frequency in the range of 30-110 kHz (x in the term Zr-C:H-x is the pulse frequencies in the deposition process) are deposited on AISI M2 substrates by a closed-field unbalanced magnetron sputtering system. The tribological properties of the films are investigated under rod-on-disc line contact wear modes using a reciprocating tribometer. The tribological behaviour of various wear pairs is discussed based on hardness (H), elastic modulus (E), adhesion property, initial Hertzian pressure and transformed layer on various contact surfaces of wear pairs. The experimental results display that the Zr-C:H-70 film with the maximum hardness and plastic deformation resistance (H3/E2) exhibits excellent tribological properties under line contact wear mode.

Original languageEnglish
Pages (from-to)S5337-S5342
JournalMaterials Research Innovations
Volume19
DOIs
Publication statusPublished - 2015 May 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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