Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI)

Yung Chun Lee; Jun Yi Ruan; Fei Bin Hsiao; Chun Ming Chen

doi:10.1109/NEMS.2008.4484363

Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI)

Yung Chun Lee, Jun Yi Ruan, Fei Bin Hsiao, Chun Ming Chen

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper discusses the theoretical modeling of laser assisted direct imprinting (LADI) which utilizes a quartz mold, pulsed laser heating, and contact pressure for direct fabricating nanostructures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has successfully developed which not only quantitatively explains the fundamental mechanism of LADI but also can be used to predict correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. Physical implications and potential applications of this modeling will be addressed.

Original language	English
Title of host publication	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Publisher	IEEE Computer Society
Pages	418-421
Number of pages	4
ISBN (Print)	9781424419081
DOIs	https://doi.org/10.1109/NEMS.2008.4484363
Publication status	Published - 2008 Jan 1
Event	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China Duration: 2008 Jan 6 → 2008 Jan 9

Publication series

Name	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Country	China
City	Sanya
Period	08-01-06 → 08-01-09

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2008.4484363

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Lee, Y. C., Ruan, J. Y., Hsiao, F. B., & Chen, C. M. (2008). Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI). In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 (pp. 418-421). [4484363] (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). IEEE Computer Society. https://doi.org/10.1109/NEMS.2008.4484363

Lee, Yung Chun ; Ruan, Jun Yi ; Hsiao, Fei Bin ; Chen, Chun Ming. / Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI). 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. IEEE Computer Society, 2008. pp. 418-421 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

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abstract = "This paper discusses the theoretical modeling of laser assisted direct imprinting (LADI) which utilizes a quartz mold, pulsed laser heating, and contact pressure for direct fabricating nanostructures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has successfully developed which not only quantitatively explains the fundamental mechanism of LADI but also can be used to predict correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. Physical implications and potential applications of this modeling will be addressed.",

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Lee, YC, Ruan, JY, Hsiao, FB & Chen, CM 2008, Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI). in 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 4484363, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, IEEE Computer Society, pp. 418-421, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 08-01-06. https://doi.org/10.1109/NEMS.2008.4484363

Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI). / Lee, Yung Chun; Ruan, Jun Yi; Hsiao, Fei Bin; Chen, Chun Ming.

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. IEEE Computer Society, 2008. p. 418-421 4484363 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - This paper discusses the theoretical modeling of laser assisted direct imprinting (LADI) which utilizes a quartz mold, pulsed laser heating, and contact pressure for direct fabricating nanostructures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has successfully developed which not only quantitatively explains the fundamental mechanism of LADI but also can be used to predict correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. Physical implications and potential applications of this modeling will be addressed.

AB - This paper discusses the theoretical modeling of laser assisted direct imprinting (LADI) which utilizes a quartz mold, pulsed laser heating, and contact pressure for direct fabricating nanostructures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has successfully developed which not only quantitatively explains the fundamental mechanism of LADI but also can be used to predict correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. Physical implications and potential applications of this modeling will be addressed.

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Lee YC, Ruan JY, Hsiao FB, Chen CM. Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI). In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. IEEE Computer Society. 2008. p. 418-421. 4484363. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). https://doi.org/10.1109/NEMS.2008.4484363