Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI)

Yung Chun Lee, Jun Yi Ruan, Fei Bin Hsiao, Chun Ming Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses the theoretical modeling of laser assisted direct imprinting (LADI) which utilizes a quartz mold, pulsed laser heating, and contact pressure for direct fabricating nanostructures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has successfully developed which not only quantitatively explains the fundamental mechanism of LADI but also can be used to predict correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. Physical implications and potential applications of this modeling will be addressed.

Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
PublisherIEEE Computer Society
Pages418-421
Number of pages4
ISBN (Print)9781424419081
DOIs
Publication statusPublished - 2008 Jan 1
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 2008 Jan 62008 Jan 9

Publication series

Name3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
CountryChina
CitySanya
Period08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, Y. C., Ruan, J. Y., Hsiao, F. B., & Chen, C. M. (2008). Theoretical modeling and experimental verification on imprinting mechanism of laser assisted direct imprinting (LADI). In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 (pp. 418-421). [4484363] (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). IEEE Computer Society. https://doi.org/10.1109/NEMS.2008.4484363