THERMAL PROBE

Hao-Chih Liu (Inventor)

Research output: Patent

Abstract

PROBLEM TO BE SOLVED: To provide a thermal probe in which a probe tip can be exchanged, and an optimum combination of the probe tip, a heating device, and a cantilever can be selected as necessary, and a manufacturing method of the same. SOLUTION: A thermal probe 2 includes a support element 21, a conductive pattern 22, and a probe tip 23. The conductive pattern 22 is arranged on the support element 21, and includes a plurality of curved sections 221. The probe tip 23 includes a base 231 and a probe end 232. The base 231 includes a first surface S1 and a second surface S2 corresponding to the first surface S1. The probe end 232 is arranged on the first surface S1, and the second surface S2 is connected to the conductive pattern 22. At least a part of the curved sections 221 is brought into contact with the first surface S1.
Translated title of the contribution熱探針
Original languageEnglish
Patent number特許5340452
Publication statusPublished - 1800

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