Thermal reaction of Ta thin films with polycrystalline diamond

J. S. Chen; E. Kolawa; M. A. Nicolet; F. S. Pool

doi:10.1016/0040-6090(93)90645-6

Thermal reaction of Ta thin films with polycrystalline diamond

J. S. Chen
, E. Kolawa
, M. A. Nicolet
, F. S. Pool

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

The thermal reaction of sputter-deposited Ta thin films with polycrystalline CVD-grown diamond substrates at temperatures between 700°C and 1100°C for 1 h is investigated by MeV He backscattering spectrometry, X-ray diffraction, and scanning electron microscopy. The product phases are polycrystalline Ta₂C at 900°C and TaC at 1000°C with an initially 135nm thick Ta film. The first phase formed conforms to the rule of Bené for metal-metal bilayers. No coexistence of Ta₂C and TaC is observed during reaction. The second phase formed, TaC, is in thermodynamic equilibrium with carbon.

Original language	English
Pages (from-to)	72-76
Number of pages	5
Journal	Thin Solid Films
Volume	236
Issue number	1-2
DOIs	https://doi.org/10.1016/0040-6090(93)90645-6
Publication status	Published - 1993 Dec 15

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(93)90645-6

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@article{3d2e1d988a104202b37a30cd6b3e0468,

title = "Thermal reaction of Ta thin films with polycrystalline diamond",

abstract = "The thermal reaction of sputter-deposited Ta thin films with polycrystalline CVD-grown diamond substrates at temperatures between 700°C and 1100°C for 1 h is investigated by MeV He backscattering spectrometry, X-ray diffraction, and scanning electron microscopy. The product phases are polycrystalline Ta2C at 900°C and TaC at 1000°C with an initially 135nm thick Ta film. The first phase formed conforms to the rule of Ben{\'e} for metal-metal bilayers. No coexistence of Ta2C and TaC is observed during reaction. The second phase formed, TaC, is in thermodynamic equilibrium with carbon.",

author = "Chen, \{J. S.\} and E. Kolawa and Nicolet, \{M. A.\} and Pool, \{F. S.\}",

note = "Funding Information: This project was supportedb y the Caltech President'sf und (PF-362).W e thank Norton Companyfo r supplyingt he diamonds ubstratesT.h e Inel position-sensitiveX -ray diffractometeart Caltechi s supported by DOE (\#DEFGO589ER75511)W. e also thank R. Gorris and M. Easterbroofko r their technicaal ssis-tance.",

year = "1993",

month = dec,

day = "15",

doi = "10.1016/0040-6090(93)90645-6",

language = "English",

volume = "236",

pages = "72--76",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

number = "1-2",

}

TY - JOUR

T1 - Thermal reaction of Ta thin films with polycrystalline diamond

AU - Chen, J. S.

AU - Kolawa, E.

AU - Nicolet, M. A.

AU - Pool, F. S.

N1 - Funding Information: This project was supportedb y the Caltech President'sf und (PF-362).W e thank Norton Companyfo r supplyingt he diamonds ubstratesT.h e Inel position-sensitiveX -ray diffractometeart Caltechi s supported by DOE (#DEFGO589ER75511)W. e also thank R. Gorris and M. Easterbroofko r their technicaal ssis-tance.

PY - 1993/12/15

Y1 - 1993/12/15

N2 - The thermal reaction of sputter-deposited Ta thin films with polycrystalline CVD-grown diamond substrates at temperatures between 700°C and 1100°C for 1 h is investigated by MeV He backscattering spectrometry, X-ray diffraction, and scanning electron microscopy. The product phases are polycrystalline Ta2C at 900°C and TaC at 1000°C with an initially 135nm thick Ta film. The first phase formed conforms to the rule of Bené for metal-metal bilayers. No coexistence of Ta2C and TaC is observed during reaction. The second phase formed, TaC, is in thermodynamic equilibrium with carbon.

AB - The thermal reaction of sputter-deposited Ta thin films with polycrystalline CVD-grown diamond substrates at temperatures between 700°C and 1100°C for 1 h is investigated by MeV He backscattering spectrometry, X-ray diffraction, and scanning electron microscopy. The product phases are polycrystalline Ta2C at 900°C and TaC at 1000°C with an initially 135nm thick Ta film. The first phase formed conforms to the rule of Bené for metal-metal bilayers. No coexistence of Ta2C and TaC is observed during reaction. The second phase formed, TaC, is in thermodynamic equilibrium with carbon.

UR - https://www.scopus.com/pages/publications/0027806858

UR - https://www.scopus.com/pages/publications/0027806858#tab=citedBy

U2 - 10.1016/0040-6090(93)90645-6

DO - 10.1016/0040-6090(93)90645-6

M3 - Article

AN - SCOPUS:0027806858

SN - 0040-6090

VL - 236

SP - 72

EP - 76

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Thermal reaction of Ta thin films with polycrystalline diamond

Abstract

All Science Journal Classification (ASJC) codes

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