Thermal stability in diamond-like carbon coated planar electron field emission arrays

Chin Maw Lin; Shoou Jinn Chang; Meiso Yokoyama; I. Nan Lin

doi:10.1116/1.1310661

Thermal stability in diamond-like carbon coated planar electron field emission arrays

Chin Maw Lin, Shoou Jinn Chang, Meiso Yokoyama, I. Nan Lin

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Field emission displays (FED) must be annealed above 400 °C during the packaging process. Thermal stability of the active layer is the most significant issue for practical application, especially for the flat panel displays. The earlier experiments confirm that DLC films are suitable for applications in FED since they can be deposited via pulsed laser deposition to make them thermally stable up to 500 °C.

Original language	English
Pages (from-to)	2424-2426
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	5
DOIs	https://doi.org/10.1116/1.1310661
Publication status	Published - 2000 Sept

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1310661

Cite this

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title = "Thermal stability in diamond-like carbon coated planar electron field emission arrays",

abstract = "Field emission displays (FED) must be annealed above 400 °C during the packaging process. Thermal stability of the active layer is the most significant issue for practical application, especially for the flat panel displays. The earlier experiments confirm that DLC films are suitable for applications in FED since they can be deposited via pulsed laser deposition to make them thermally stable up to 500 °C.",

author = "Lin, {Chin Maw} and Chang, {Shoou Jinn} and Meiso Yokoyama and Lin, {I. Nan}",

year = "2000",

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doi = "10.1116/1.1310661",

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AU - Lin, Chin Maw

AU - Chang, Shoou Jinn

AU - Yokoyama, Meiso

AU - Lin, I. Nan

PY - 2000/9

Y1 - 2000/9

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AB - Field emission displays (FED) must be annealed above 400 °C during the packaging process. Thermal stability of the active layer is the most significant issue for practical application, especially for the flat panel displays. The earlier experiments confirm that DLC films are suitable for applications in FED since they can be deposited via pulsed laser deposition to make them thermally stable up to 500 °C.

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ER -

Thermal stability in diamond-like carbon coated planar electron field emission arrays

Abstract

All Science Journal Classification (ASJC) codes

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