Thermal stability of post-growth-annealed Ga-doped MgZnO films grown by the RF sputtering method

Kuang Po Hsueh, Po Wei Cheng, Wen Yen Lin, Hsien Chin Chiu, Hsiang Chun Wang, Jinn-Kong Sheu, Yu Hsiang Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A radio-frequency magnetron sputtering technique and subsequent rapid thermal annealing (RTA) at 600, 700, 800, and 900 °C were implemented to grow high-quality Ga-doped Mg x Zn 1-x O (GMZO) epi-layers. The GMZO films were deposited using a radio-frequency magnetron sputtering system and a 4 inch ZnO/MgO/Ga 2 O 3 (75/20/5 wt %) target. The Hall results, X-ray diffraction (XRD), and transmittance were determined and are reported in this paper. The Hall results indicated that the increase in mobility was likely caused by the improved crystallization in the GMZO films after thermal annealing. The XRD results revealed that Mg x Zn 1-x O (111) and MgO 2 (200) peaks were obtained in the GMZO films. The absorption edges of the as-grown and annealed GMZO films shifted toward the short wavelength of 373 ran at a transmittance of 90%. According to these results, GMZO films are feasible for forming transparent contact layers for near-ultraviolet light-emitting diodes.

Original languageEnglish
Title of host publicationSynthesis, Characterization, and Applications of Functional Materials - Thin Films and Nanostructures
EditorsQuanxi Jia, Dhananjay Kumar, Xavier Obradors, Kaushal K. Singh, Valentin Craciun, Maryline Guilloux-Viry, Menka Jain, Hiromitsu Kozuka, Sanjay Mathur
PublisherMaterials Research Society
Pages41-44
Number of pages4
ISBN (Electronic)9781605116525
DOIs
Publication statusPublished - 2014 Jan 1
Event2014 MRS Spring Meeting - San Francisco, United States
Duration: 2014 Apr 212014 Apr 25

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1675
ISSN (Print)0272-9172

Other

Other2014 MRS Spring Meeting
CountryUnited States
CitySan Francisco
Period14-04-2114-04-25

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Hsueh, K. P., Cheng, P. W., Lin, W. Y., Chiu, H. C., Wang, H. C., Sheu, J-K., & Yeh, Y. H. (2014). Thermal stability of post-growth-annealed Ga-doped MgZnO films grown by the RF sputtering method. In Q. Jia, D. Kumar, X. Obradors, K. K. Singh, V. Craciun, M. Guilloux-Viry, M. Jain, H. Kozuka, & S. Mathur (Eds.), Synthesis, Characterization, and Applications of Functional Materials - Thin Films and Nanostructures (pp. 41-44). (Materials Research Society Symposium Proceedings; Vol. 1675). Materials Research Society. https://doi.org/10.1557/opl.2014.836