Thin oxide growth by intermediate annealing process

Bin-Da Liu, H. Y. Sun

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)217-219
Number of pages3
JournalSolid State Electronics
Volume34
Issue number2
DOIs
Publication statusPublished - 1991 Jan 1

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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