Fingerprint
Dive into the research topics of 'TiB2 as a diffusion barrier for Cu/〈Si〉 metallization'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
TiB2 as a diffusion barrier for Cu/〈Si〉 metallization
J. L. Wang, J. S. Chen
Research output: Contribution to journal › Article › peer-review
1
Citation
(Scopus)