Top-Gated P-MOSFET with CVD-Grown WSe2 Channels via Self-Aligned WOx Conversion for Spacer Doping

  • Meng Zhan Li
  • , Terry Y.T. Hung
  • , Wei Sheng Yun
  • , D. Mahaveer Sathaiya
  • , Sui An Chou
  • , San Lin Liew
  • , Ying Mei Yang
  • , Kuang I. Lin
  • , Tung Ying Lee
  • , Chao Ching Cheng
  • , Chung Cheng Wu
  • , Iuliana P. Radu
  • , Minn Tsong Lin

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

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Material Science

Chemical Engineering

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