Trap properties of high-k/metal gate pMOSFETs with aluminum ion implantation by random telegraph noise and 1/f noise measurements

Tsung Hsien Kao, San Lein Wu, Kai Shiang Tsai, Yean Kuen Fang, Chien Ming Lai, Chia Wei Hsu, Yi Wen Chen, Osbert Cheng, Shoou Jinn Chang

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2 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science