Tribological performance of ZrN ceramic thin films with Ti additions

Sun Hui Yao, Yan Liang Su, Wen Xian Gao, Kai Wen Cheng

Research output: Contribution to journalArticlepeer-review


Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.

Original languageEnglish
Pages (from-to)413-416
Number of pages4
JournalMocaxue Xuebao/Tribology
Issue number5
Publication statusPublished - 2006 Sep 1

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces, Coatings and Films
  • Materials Chemistry


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