Abstract
Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.
| Original language | English |
|---|---|
| Pages (from-to) | 413-416 |
| Number of pages | 4 |
| Journal | Mocaxue Xuebao/Tribology |
| Volume | 26 |
| Issue number | 5 |
| Publication status | Published - 2006 Sept |
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Surfaces, Coatings and Films
- Materials Chemistry