Tribological performance of ZrN ceramic thin films with Ti additions

Sun Hui Yao; Yan Liang Su; Wen Xian Gao; Kai Wen Cheng

Tribological performance of ZrN ceramic thin films with Ti additions

Sun Hui Yao, Yan Liang Su, Wen Xian Gao, Kai Wen Cheng

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK_0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.

Original language	English
Pages (from-to)	413-416
Number of pages	4
Journal	Mocaxue Xuebao/Tribology
Volume	26
Issue number	5
Publication status	Published - 2006 Sep 1

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering
Surfaces, Coatings and Films
Materials Chemistry

Cite this

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title = "Tribological performance of ZrN ceramic thin films with Ti additions",

abstract = "Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.",

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N2 - Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.

AB - Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.

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Tribological performance of ZrN ceramic thin films with Ti additions

Abstract

All Science Journal Classification (ASJC) codes

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