Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at.% Ti. However, the film with addition of 16.5 at.% Ti showed the best wear performance and the highest critical loads.
|Number of pages||4|
|Publication status||Published - 2006 Sep 1|
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Surfaces, Coatings and Films
- Materials Chemistry