Tribology properties of IGZO films by the sliding contacts of reciprocating motion

Tse Chang Li, Ching Lin Hsiao, Yu Ching Chiang, Jen Fin Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the present study, sliding tribo tests with reciprocating motion were carried out to simulate the thumb-driven wear arising in indium gallium zinc oxide (IGZO) specimens prepared at five inclination angles during film deposition. Frictional and normal forces, Fx and Fy, and vibrations were used to analyze energy dissipation (ΔW) and composite mean force fluctuation intensities (IFSS). Friction coefficient is lowered by decreasing the mean surface roughness (Ra); its increase can raise ΔW. The friction coefficients of samples prepared with a nonzero inclination angle were lower than that of the IGZO-0° specimen.

Original languageEnglish
Title of host publicationEngineering Tribology and Materials - ICETAT 2016
EditorsYunn Lin Hwang, Jeng Haur Horng
PublisherTrans Tech Publications Ltd
Pages68-74
Number of pages7
ISBN (Print)9783035710762
DOIs
Publication statusPublished - 2017 Jan 1
EventInternational Conference on Engineering Tribology and Applied Technology, ICETAT 2016 - Taipei, Taiwan
Duration: 2016 Nov 42016 Nov 6

Publication series

NameKey Engineering Materials
Volume739 KEM
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

OtherInternational Conference on Engineering Tribology and Applied Technology, ICETAT 2016
CountryTaiwan
CityTaipei
Period16-11-0416-11-06

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Li, T. C., Hsiao, C. L., Chiang, Y. C., & Lin, J. F. (2017). Tribology properties of IGZO films by the sliding contacts of reciprocating motion. In Y. L. Hwang, & J. H. Horng (Eds.), Engineering Tribology and Materials - ICETAT 2016 (pp. 68-74). (Key Engineering Materials; Vol. 739 KEM). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.739.68