Two-axis MEMS scanning mirror driven by a single PZT actuator

Chung-De Chen, Yu Jen Wang, Chien Hsien Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.

Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1261-1266
Number of pages6
ISBN (Print)9781479957361
DOIs
Publication statusPublished - 2014 Jan 1
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: 2014 Jul 82014 Jul 11

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Other

Other2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
CountryFrance
CityBesancon
Period14-07-0814-07-11

Fingerprint

MEMS
Mirrors
Actuators
Scanning
Vibration analysis
Bending moments
Torsional stress
Torque

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Chen, C-D., Wang, Y. J., & Yeh, C. H. (2014). Two-axis MEMS scanning mirror driven by a single PZT actuator. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics (pp. 1261-1266). [6878255] (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AIM.2014.6878255
Chen, Chung-De ; Wang, Yu Jen ; Yeh, Chien Hsien. / Two-axis MEMS scanning mirror driven by a single PZT actuator. AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1261-1266 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM).
@inproceedings{17945091e60a440ba13531215ebef571,
title = "Two-axis MEMS scanning mirror driven by a single PZT actuator",
abstract = "In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.",
author = "Chung-De Chen and Wang, {Yu Jen} and Yeh, {Chien Hsien}",
year = "2014",
month = "1",
day = "1",
doi = "10.1109/AIM.2014.6878255",
language = "English",
isbn = "9781479957361",
series = "IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1261--1266",
booktitle = "AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics",
address = "United States",

}

Chen, C-D, Wang, YJ & Yeh, CH 2014, Two-axis MEMS scanning mirror driven by a single PZT actuator. in AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics., 6878255, IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, Institute of Electrical and Electronics Engineers Inc., pp. 1261-1266, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, 14-07-08. https://doi.org/10.1109/AIM.2014.6878255

Two-axis MEMS scanning mirror driven by a single PZT actuator. / Chen, Chung-De; Wang, Yu Jen; Yeh, Chien Hsien.

AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1261-1266 6878255 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Two-axis MEMS scanning mirror driven by a single PZT actuator

AU - Chen, Chung-De

AU - Wang, Yu Jen

AU - Yeh, Chien Hsien

PY - 2014/1/1

Y1 - 2014/1/1

N2 - In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.

AB - In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.

UR - http://www.scopus.com/inward/record.url?scp=84906657483&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84906657483&partnerID=8YFLogxK

U2 - 10.1109/AIM.2014.6878255

DO - 10.1109/AIM.2014.6878255

M3 - Conference contribution

SN - 9781479957361

T3 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

SP - 1261

EP - 1266

BT - AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Chen C-D, Wang YJ, Yeh CH. Two-axis MEMS scanning mirror driven by a single PZT actuator. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1261-1266. 6878255. (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). https://doi.org/10.1109/AIM.2014.6878255