@inproceedings{17945091e60a440ba13531215ebef571,
title = "Two-axis MEMS scanning mirror driven by a single PZT actuator",
abstract = "In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.",
author = "Chen, {Chung De} and Wang, {Yu Jen} and Yeh, {Chien Hsien}",
year = "2014",
month = jan,
day = "1",
doi = "10.1109/AIM.2014.6878255",
language = "English",
isbn = "9781479957361",
series = "IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1261--1266",
booktitle = "AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics",
address = "United States",
note = "2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 ; Conference date: 08-07-2014 Through 11-07-2014",
}