Two-axis MEMS scanning mirror driven by a single PZT actuator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.

Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1261-1266
Number of pages6
ISBN (Print)9781479957361
DOIs
Publication statusPublished - 2014 Jan 1
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: 2014 Jul 82014 Jul 11

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Other

Other2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
CountryFrance
CityBesancon
Period14-07-0814-07-11

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

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