Ultra small self-organized nitride nanotips

L. W. Ji, T. H. Fang, S. C. Hung, Y. K. Su, S. J. Chang, R. W. Chuang

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Vertical self-organized nanotips were grown on InGaN film via metal-organic chemical vapor deposition (MOCVD) and thermal annealing. It was found that the typical height of these nanotips is 20 nm with an average width of 1 nm. It was also found that the local density of the vertically grown self-assembled InGaN nanotips could reach 1.6× 1013 cm-2. The possible formation mechanism of self-assembled nanotips has been also discussed in this work. Such a small size of vertical nanotips could show strong quantum localization effects and have potential applications in field emission devices, near-field microscopy, and blue photonics.

Original languageEnglish
Pages (from-to)2496-2498
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume23
Issue number6
DOIs
Publication statusPublished - 2005 Nov 1

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Nanotips
Nitrides
nitrides
metalorganic chemical vapor deposition
field emission
near fields
photonics
microscopy
annealing
Organic chemicals
Field emission
Photonics
Chemical vapor deposition
Microscopic examination
Annealing
Metals

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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Ultra small self-organized nitride nanotips. / Ji, L. W.; Fang, T. H.; Hung, S. C.; Su, Y. K.; Chang, S. J.; Chuang, R. W.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 23, No. 6, 01.11.2005, p. 2496-2498.

Research output: Contribution to journalArticle

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