Abstract
Vertical self-organized nanotips were grown on InGaN film via metal-organic chemical vapor deposition (MOCVD) and thermal annealing. It was found that the typical height of these nanotips is 20 nm with an average width of 1 nm. It was also found that the local density of the vertically grown self-assembled InGaN nanotips could reach 1.6× 1013 cm-2. The possible formation mechanism of self-assembled nanotips has been also discussed in this work. Such a small size of vertical nanotips could show strong quantum localization effects and have potential applications in field emission devices, near-field microscopy, and blue photonics.
Original language | English |
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Pages (from-to) | 2496-2498 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 23 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2005 Nov |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering