Ultrasensitive Thin-Film-Based AlxGa1-xN Piezotronic Strain Sensors via Alloying-Enhanced Piezoelectric Potential

Chao Hung Wang, Kun Yu Lai, Yi Chang Li, Yen Chih Chen, Chuan-Pu Liu

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

AlxGa1-xN thin-film-based piezotronic strain sensors with ultrahigh strain sensitivity are fabricated through alloying of AlN with GaN. The strain sensitivity of the ternary compound AlxGa1-xN is higher than those of the individual binary compounds GaN and AlN. Such a high performance can be attributed to the piezoelectric constant enhancement via intercalation of Al atoms into the GaN matrix, the effect of residual strain, and a suppressed screening effect.

Original languageEnglish
Pages (from-to)6289-6295
Number of pages7
JournalAdvanced Materials
Volume27
Issue number40
DOIs
Publication statusPublished - 2015 Oct 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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