Ultrasound assisted laser machining and surface cleaning

Chi Cheng Chiu, Chih Hao Chang, Yung-Chun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages872-875
Number of pages4
DOIs
Publication statusPublished - 2010 Nov 29
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 2010 Jan 202010 Jan 23

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
CountryChina
CityXiamen
Period10-01-2010-01-23

Fingerprint

Surface cleaning
Machining
Ultrasonics
Lasers
Ablation
Debris
Vibrations (mechanical)

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Chiu, C. C., Chang, C. H., & Lee, Y-C. (2010). Ultrasound assisted laser machining and surface cleaning. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 872-875). [5592155] (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592155
Chiu, Chi Cheng ; Chang, Chih Hao ; Lee, Yung-Chun. / Ultrasound assisted laser machining and surface cleaning. 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. pp. 872-875 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).
@inproceedings{d6728f886fc7430ba2910ef4d028c627,
title = "Ultrasound assisted laser machining and surface cleaning",
abstract = "This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.",
author = "Chiu, {Chi Cheng} and Chang, {Chih Hao} and Yung-Chun Lee",
year = "2010",
month = "11",
day = "29",
doi = "10.1109/NEMS.2010.5592155",
language = "English",
isbn = "9781424465439",
series = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",
pages = "872--875",
booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

}

Chiu, CC, Chang, CH & Lee, Y-C 2010, Ultrasound assisted laser machining and surface cleaning. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592155, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp. 872-875, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 10-01-20. https://doi.org/10.1109/NEMS.2010.5592155

Ultrasound assisted laser machining and surface cleaning. / Chiu, Chi Cheng; Chang, Chih Hao; Lee, Yung-Chun.

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 872-875 5592155 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Ultrasound assisted laser machining and surface cleaning

AU - Chiu, Chi Cheng

AU - Chang, Chih Hao

AU - Lee, Yung-Chun

PY - 2010/11/29

Y1 - 2010/11/29

N2 - This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.

AB - This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.

UR - http://www.scopus.com/inward/record.url?scp=78649233672&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78649233672&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2010.5592155

DO - 10.1109/NEMS.2010.5592155

M3 - Conference contribution

SN - 9781424465439

T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

SP - 872

EP - 875

BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

ER -

Chiu CC, Chang CH, Lee Y-C. Ultrasound assisted laser machining and surface cleaning. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 872-875. 5592155. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592155