TY - GEN
T1 - Ultrasound assisted laser machining and surface cleaning
AU - Chiu, Chi Cheng
AU - Chang, Chih Hao
AU - Lee, Yung-Chun
PY - 2010/11/29
Y1 - 2010/11/29
N2 - This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.
AB - This paper investigates a new approach of using ultrasound to assist material ablation efficiency in laser machining processes. Typical laser machining methods suffer a common problem that the laser-ablated material particles will fall back to the sample surface and therefore either deter subsequent laser machining process or result in material debris on sample surface. In this work we introduce high frequency mechanical vibration, or ultrasound, to the sample under laser machining. The oscillation of sample surface can eject laser-ablated particles and therefore achieve both purposes of surface cleaning and machining speed increasing. Preliminary experimental results have support the feasibility of the propose method which can effectively improve machining quality in most laser machining for a wide variety of materials.
UR - http://www.scopus.com/inward/record.url?scp=78649233672&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78649233672&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2010.5592155
DO - 10.1109/NEMS.2010.5592155
M3 - Conference contribution
AN - SCOPUS:78649233672
SN - 9781424465439
T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
SP - 872
EP - 875
BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Y2 - 20 January 2010 through 23 January 2010
ER -