TY - JOUR
T1 - Ultraviolet Beam Lithography System for Digital Fabrication of Roller Molds
AU - Yang, Shan
AU - Lee, Yung Chun
N1 - Funding Information:
Manuscript received September 6, 2019; revised May 3, 2020 and July 7, 2020; accepted July 15, 2020. Date of publication July 21, 2020; date of current version February 16, 2021. This work was supported by the Ministry of Science and Technology of Taiwan under Contracts of MOST 106-3332-E-006-135-MY2. Recommended by Technical Editor L. Zhu and Senior Editor W. J. C. Zhang. (Corresponding author: Yung-Chun Lee.) The authors are with the Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan (e-mail: [email protected]; [email protected]).
Publisher Copyright:
© 1996-2012 IEEE.
PY - 2021/2
Y1 - 2021/2
N2 - This article presents a digital ultraviolet (UV) beam lithography system for fabricating microstructures of arbitrary patterns on a roller mold. This roller mold can then be used in roller imprinting for fast and large-area replication of microstructures on substrates. This digital optomechanical system consists of a UV light source, a digital micromirror device (DMD) and its electronic controller, a high-precision image lens, a fiber array integrated with microlenses on both ends, and a two-axis (x-θ) servo-controlled motion stage. It exposes a photoresist (PR) layer coated on the cylindrical surface of a roller with a linear array of 192 small UV spots focused by a microlens/fiber array. On the other end of the fibers, UV light is fed by DMD's micromirrors so that the UV light can be dynamically modulated. Finally, by synchronizing the electronics of DMD chip and the mechanical movement (rotation and translation) of the roller, one can achieve arbitrary UV patterning on the roller's PR layer in a digital and maskless manner. This system can successfully achieve UV patterning with a smallest linewidth of 8 μm, a pattern resolution of 2.5 μm, and a total patterning width of 192 mm on a roller with a diameter of 100 mm.
AB - This article presents a digital ultraviolet (UV) beam lithography system for fabricating microstructures of arbitrary patterns on a roller mold. This roller mold can then be used in roller imprinting for fast and large-area replication of microstructures on substrates. This digital optomechanical system consists of a UV light source, a digital micromirror device (DMD) and its electronic controller, a high-precision image lens, a fiber array integrated with microlenses on both ends, and a two-axis (x-θ) servo-controlled motion stage. It exposes a photoresist (PR) layer coated on the cylindrical surface of a roller with a linear array of 192 small UV spots focused by a microlens/fiber array. On the other end of the fibers, UV light is fed by DMD's micromirrors so that the UV light can be dynamically modulated. Finally, by synchronizing the electronics of DMD chip and the mechanical movement (rotation and translation) of the roller, one can achieve arbitrary UV patterning on the roller's PR layer in a digital and maskless manner. This system can successfully achieve UV patterning with a smallest linewidth of 8 μm, a pattern resolution of 2.5 μm, and a total patterning width of 192 mm on a roller with a diameter of 100 mm.
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U2 - 10.1109/TMECH.2020.3010976
DO - 10.1109/TMECH.2020.3010976
M3 - Article
AN - SCOPUS:85089290190
SN - 1083-4435
VL - 26
SP - 226
EP - 234
JO - IEEE/ASME Transactions on Mechatronics
JF - IEEE/ASME Transactions on Mechatronics
IS - 1
M1 - 9145867
ER -