Unified fabrication process for complex gratings

Chi Chun Ho, Jung-San Chen, Chia Heng Lin, Yung-Chun Lee, Yu Bin Chen

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.

Original languageEnglish
Article number034502
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume15
Issue number3
DOIs
Publication statusPublished - 2016 Jul 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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