Unified fabrication process for complex gratings

Chi Chun Ho; Jung-San Chen; Chia Heng Lin; Yung-Chun Lee; Yu Bin Chen

doi:10.1117/1.JMM.15.3.034502

Unified fabrication process for complex gratings

Chi Chun Ho, Jung-San Chen, Chia Heng Lin, Yung-Chun Lee, Yu Bin Chen

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm² samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.

Original language	English
Article number	034502
Journal	Journal of Micro/ Nanolithography, MEMS, and MOEMS
Volume	15
Issue number	3
DOIs	https://doi.org/10.1117/1.JMM.15.3.034502
Publication status	Published - 2016 Jul 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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AU - Ho, Chi Chun

AU - Chen, Jung-San

AU - Lin, Chia Heng

AU - Lee, Yung-Chun

AU - Chen, Yu Bin

PY - 2016/7/1

Y1 - 2016/7/1

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AB - A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.

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