Abstract
A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.
| Original language | English |
|---|---|
| Article number | 034502 |
| Journal | Journal of Micro/ Nanolithography, MEMS, and MOEMS |
| Volume | 15 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2016 Jul 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
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Unified fabrication process for complex gratings. / Ho, Chi Chun; Chen, Jung-San; Lin, Chia Heng; Lee, Yung-Chun; Chen, Yu Bin.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 15, No. 3, 034502, 01.07.2016.Research output: Contribution to journal › Article
TY - JOUR
T1 - Unified fabrication process for complex gratings
AU - Ho, Chi Chun
AU - Chen, Jung-San
AU - Lin, Chia Heng
AU - Lee, Yung-Chun
AU - Chen, Yu Bin
PY - 2016/7/1
Y1 - 2016/7/1
N2 - A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.
AB - A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.
UR - http://www.scopus.com/inward/record.url?scp=84979642531&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84979642531&partnerID=8YFLogxK
U2 - 10.1117/1.JMM.15.3.034502
DO - 10.1117/1.JMM.15.3.034502
M3 - Article
VL - 15
JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS
SN - 1932-5150
IS - 3
M1 - 034502
ER -