Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable surface plasmon resonances

H. L. Chen, K. C. Hsieh, C. H. Lin, S. H. Chen

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to -15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.

Original languageEnglish
Article number435304
JournalNanotechnology
Volume19
Issue number43
DOIs
Publication statusPublished - 2008 Oct 22

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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