Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique

Chien Hung Wu, Kow-Ming Chang, Yu Xin Zhang, Yi-Ming Chen, Shui-Jinn Wang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	The 14th International Conference on Nano Science and Nano Technology
Place of Publication	Mokpo, Korea
Publication status	Published - 2016 Nov 10

Cite this

@inproceedings{3de007c619304e53b7fa2805b535794d,

title = "Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique",

author = "Wu, {Chien Hung} and Kow-Ming Chang and Zhang, {Yu Xin} and Yi-Ming Chen and Shui-Jinn Wang",

year = "2016",

month = nov,

day = "10",

language = "English",

booktitle = "The 14th International Conference on Nano Science and Nano Technology",

}