Using KrF ELA to Improve Gate-Stacked LaAlO3/ZrO2 IGZO-TFTs with Novel AP-PECVD Technique

Chien Hung Wu, Kow-Ming Chang, Yu Xin Zhang, Yi-Ming Chen, Shui-Jinn Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 14th International Conference on Nano Science and Nano Technology
Place of PublicationMokpo, Korea
Publication statusPublished - 2016 Nov 10

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