TY - JOUR
T1 - Using nanoindentation and cathodoluminescence to identify the bundled effect of gallium nitride grown by PA-MBE
AU - Wen, Hua Chiang
AU - Chou, Wu Ching
AU - Chiang, Tun Yuan
AU - Jeng, Yeau Ren
AU - Fan, Wen Chung
N1 - Funding Information:
This research was supported by the National Science Council of Taiwan under Contract (MOST 103-2119-M-009 -002 and 104-2119-M-009 -010 -MY3 ). The author thanks the Center for advanced instrumentation (Department of Electrophysics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.) and for assistance with the CL/SEM/EDS measurements (JEOL JSM-7001F field-emission scanning electron microscope); Prof. Yeau-Ren Jeng for the supporting the SPM equipment used in this study. We also thanks Prof. Tun-Yuan Chiang for help with the SPM data analysis; Dr. Wen-Chung Fan for the preparation of specimens from MBE system.
Publisher Copyright:
© 2016 Elsevier B.V.
PY - 2017
Y1 - 2017
N2 - We performed cathodoluminescence (CL) investigations on GaN NCs grown using molecular beam epitaxy. Bundled GaN was used to form NCs that were deposited onto commercial sapphire templates. The structures of the bundled NCs were analyzed using nanoindentation. The samples were grown with a TGof 700, 800, and 850 °C, and the H values were 7.4 ± 0.2 and 6.4 ± 0.2 GPa; the E values were 308.4 ± 4.3, 296.4 ± 3.8, and 75.5 ± 1.4 GPa, respectively. It is suspected that the discrepancies of the mechanical parameters obtained by various indentation methods are partially a result of the stress distribution inherent in the different orientations on the sapphire substrate. A scanning electron microscopy (SEM) system equipped with CL allows the direct comparison of SEM images and CL maps, captured from exactly the same area of the samples. In addition to the SEM and CL images, photoluminescence spectroscopy (PL) profiling was obtained by collecting the 20 K PL spectra at the samples. The PL profiling enables the distinguishing of the emissions by the 5 meV of the blueshift from 3.440 to 3.445 eV due to localization effects. The bundled GaN NCs resulted from the (0002) reflection at 34.6° for a wurtzite structure and a raised intensity difference when the TGwas increased from 700 to 850 °C. The crystal texture of the GaN can influence the mechanical properties at different TGstages.
AB - We performed cathodoluminescence (CL) investigations on GaN NCs grown using molecular beam epitaxy. Bundled GaN was used to form NCs that were deposited onto commercial sapphire templates. The structures of the bundled NCs were analyzed using nanoindentation. The samples were grown with a TGof 700, 800, and 850 °C, and the H values were 7.4 ± 0.2 and 6.4 ± 0.2 GPa; the E values were 308.4 ± 4.3, 296.4 ± 3.8, and 75.5 ± 1.4 GPa, respectively. It is suspected that the discrepancies of the mechanical parameters obtained by various indentation methods are partially a result of the stress distribution inherent in the different orientations on the sapphire substrate. A scanning electron microscopy (SEM) system equipped with CL allows the direct comparison of SEM images and CL maps, captured from exactly the same area of the samples. In addition to the SEM and CL images, photoluminescence spectroscopy (PL) profiling was obtained by collecting the 20 K PL spectra at the samples. The PL profiling enables the distinguishing of the emissions by the 5 meV of the blueshift from 3.440 to 3.445 eV due to localization effects. The bundled GaN NCs resulted from the (0002) reflection at 34.6° for a wurtzite structure and a raised intensity difference when the TGwas increased from 700 to 850 °C. The crystal texture of the GaN can influence the mechanical properties at different TGstages.
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U2 - 10.1016/j.jallcom.2016.09.237
DO - 10.1016/j.jallcom.2016.09.237
M3 - Article
AN - SCOPUS:84989172615
SN - 0925-8388
VL - 693
SP - 615
EP - 621
JO - Journal of Alloys and Compounds
JF - Journal of Alloys and Compounds
ER -