Using Pt dopant and sol gel technology for sensitivity enhancement of TiO2/SnO2 humidity sensors

Wen Yang Chang, Wen Wang Ke, Yu Sheng Hsieh, Nai Hao Kuo, Yu Cheng Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The sensitivity of the humidity sensor based on hybrid thin films of nanostructure TiO2/SnO2 with Pt dopant was successfully increased. The humidity-sensitive materials, TiO2/SnO2, were prepared by sol gel technology. The microstructure of the sensing film after calcination was investigated by the Field Emission gun Scanning Electron Microscopy (FESEM) and revealed that the metal oxide hybrid had about 10 nm grain size. For studying the effect of Pt dopant on the humidity-sensitive responses, 1 ml to 10 ml of Pt standard solution was added into the colloidal solution. To compare the humidity sensor of Pt dopant with that of no Pt dopant, operational frequencies and electrode spacing were set under the relative humidity from 30 % to 95 % at the ambient temperature of 22°C. We demonstrated that adding Pt dopant remarkably enhanced the sensitivity of TiO2/SnO2 humidity sensor, and further decreased the TiO2/SnO2 resistance, which was 3.3 times lower than that without Pt dopant at the high humidity.

Original languageEnglish
Title of host publicationProceedings of the 2005 27th Annual International Conference of the Engineering in Medicine and Biology Society, IEEE-EMBS 2005
Pages1937-1940
Number of pages4
Publication statusPublished - 2005 Dec 1
Event2005 27th Annual International Conference of the Engineering in Medicine and Biology Society, IEEE-EMBS 2005 - Shanghai, China
Duration: 2005 Sep 12005 Sep 4

Publication series

NameAnnual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings
Volume7 VOLS
ISSN (Print)0589-1019

Other

Other2005 27th Annual International Conference of the Engineering in Medicine and Biology Society, IEEE-EMBS 2005
CountryChina
CityShanghai
Period05-09-0105-09-04

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Biomedical Engineering
  • Computer Vision and Pattern Recognition
  • Health Informatics

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  • Cite this

    Chang, W. Y., Ke, W. W., Hsieh, Y. S., Kuo, N. H., & Lin, Y. C. (2005). Using Pt dopant and sol gel technology for sensitivity enhancement of TiO2/SnO2 humidity sensors. In Proceedings of the 2005 27th Annual International Conference of the Engineering in Medicine and Biology Society, IEEE-EMBS 2005 (pp. 1937-1940). [1616831] (Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings; Vol. 7 VOLS).