Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions

Shui-Jinn Wang, C.- F. Cheng, C. H. Wu, N. C. Su, S. P. McAlister, A. Chin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationInternational Electron Devices Meeting (IEDM) Tech. Dig.
Publication statusPublished - 2007 Dec

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