Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions

Shui-Jinn Wang, C.- F. Cheng, C. H. Wu, N. C. Su, S. P. McAlister, A. Chin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationInternational Electron Devices Meeting (IEDM) Tech. Dig.
Publication statusPublished - 2007 Dec

Cite this

Wang, S-J., Cheng, C. . F., Wu, C. H., Su, N. C., McAlister, S. P., & Chin, A. (2007). Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions. In International Electron Devices Meeting (IEDM) Tech. Dig.