Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions

Shui-Jinn Wang, C.- F. Cheng, C. H. Wu, N. C. Su, S. P. McAlister, A. Chin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	International Electron Devices Meeting (IEDM) Tech. Dig.
Publication status	Published - 2007 Dec

Cite this

@inproceedings{862d1b61e86048cabc268b70ebd18eb7,

title = "Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions",

author = "Shui-Jinn Wang and Cheng, {C.- F.} and Wu, {C. H.} and Su, {N. C.} and McAlister, {S. P.} and A. Chin",

year = "2007",

month = dec,

language = "English",

booktitle = "International Electron Devices Meeting (IEDM) Tech. Dig.",

}