Original language | English |
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Title of host publication | International Electron Devices Meeting (IEDM) Tech. Dig. |
Publication status | Published - 2007 Dec |
Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions
Shui-Jinn Wang, C.- F. Cheng, C. H. Wu, N. C. Su, S. P. McAlister, A. Chin
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution