Aligned carbon nanotubes were grown on metallic substrates using a microwave plasma-enhanced chemical vapor deposition system. The substrates were Ni and Cu, and the catalyst was an Fe-Si alloy thin film. The effects of substrate and catalyst characteristics and growth temperature were studied. We show, via the use of a microwave shield, and with optimized catalyst thickness and growth temperature, that carbon nanotubes (CNTs) with a length of up to 2.15 mm and an unprecedently high growth rate of 177 μm min-1 can obtained. Non-isothermal growth was performed to investigate the growth kinetics and therefore to obtain the activation energies of CNTs grown on Ni and Cu. Very similar activation energies for the growth of CNTs on Ni and Cu substrates were determined to be 101.5 (1.05 eV) kJ mol-1 and 102.3 (1.06 eV) kJ mol-1, respectively.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Polymers and Plastics
- Metals and Alloys