Vibration control on single axis flexible piezoelectric positioning stage by PID controller

Yun Hui Liu, Ching Ming Chao, Chin Tu Lu, Kuo-Shen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The objective of this study is to suppress the relative displacement between lens set and granite platform using a micro flexible positioning mechanism, installed between lens set and gantry, with active vibration control. The relative displacement between lens set and granite platform was measured by a sensor and was then sent to a controller as input. If there is any horizontally relative displacement, the controller will send an output signal to a piezoelectric actuator in the positioning mechanism to cancel out the relative displacement. In the current study, a PID controller was applied to control the single axis mechanism. The displacement signal was detected by a laser displacement transducer for the feedback control. In addition, a mathematical model is set up for the piezoelectric micro positioning stage to simulate the performance of the PID controller under step inputs. Output displacement responses of the flexible positioning stage are observed by varying the proportional, integral, derivative parameters of the controller. The goal of this study is to suppress the horizontally relative displacement of 15 ∼ 20μm(peak value) between the lens set and granite platform under a frequency range of 0 ∼ 10 Hz. Through simulations and experiments of dynamic tracking, it was verified that the vibration of stage is effectively decreased to 2 ∼ 3μm after control under the proposed frequency range.

Original languageEnglish
Title of host publicationAdvances in Environmental Vibration - Proceedings of the 5th International Symposium on Environmental Vibration, ISEV 2011
EditorsHirokazu Takemiya, G. De Roeck, Wanming Zhai, E. Tutumluer
PublisherScience Press
Pages883-889
Number of pages7
ISBN (Electronic)9787030323736
Publication statusPublished - 2011 Jan 1
Event5th International Symposium on Environmental Vibration, ISEV 2011 - Chengdu, China
Duration: 2011 Oct 202011 Oct 22

Publication series

NameAdvances in Environmental Vibration - Proceedings of the 5th International Symposium on Environmental Vibration, ISEV 2011

Other

Other5th International Symposium on Environmental Vibration, ISEV 2011
CountryChina
CityChengdu
Period11-10-2011-10-22

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Visual Arts and Performing Arts
  • Environmental Engineering
  • Management, Monitoring, Policy and Law

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