TY - GEN
T1 - Virtual-metrology-based FDC scheme
AU - Hsieh, Yao Sheng
AU - Cheng, Fan Tien
AU - Yang, Haw Ching
PY - 2012/12/1
Y1 - 2012/12/1
N2 - Most conventional fault-detection-and-classification (FDC) approaches are to find out the target devices (TDs) required for monitoring and the TDs' related key parameters needed to be monitored, and then by applying the statistical-process-control (SPC) approach to detect the faults. However, in practical situation, an abnormal key-parameter value may not be solely caused by its own TD; instead, it may also be resulted from the other related parameters. As a result, accurate fault classification or diagnosis may not be achieved. The purpose of this paper is to propose a virtual-metrology-based baseline FDC scheme that includes the TD baseline model and FDC logic. By applying this baseline FDC scheme, fault diagnosis can then be accomplished.
AB - Most conventional fault-detection-and-classification (FDC) approaches are to find out the target devices (TDs) required for monitoring and the TDs' related key parameters needed to be monitored, and then by applying the statistical-process-control (SPC) approach to detect the faults. However, in practical situation, an abnormal key-parameter value may not be solely caused by its own TD; instead, it may also be resulted from the other related parameters. As a result, accurate fault classification or diagnosis may not be achieved. The purpose of this paper is to propose a virtual-metrology-based baseline FDC scheme that includes the TD baseline model and FDC logic. By applying this baseline FDC scheme, fault diagnosis can then be accomplished.
UR - http://www.scopus.com/inward/record.url?scp=84872551716&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84872551716&partnerID=8YFLogxK
U2 - 10.1109/CoASE.2012.6386371
DO - 10.1109/CoASE.2012.6386371
M3 - Conference contribution
AN - SCOPUS:84872551716
SN - 9781467304283
T3 - IEEE International Conference on Automation Science and Engineering
SP - 80
EP - 85
BT - 2012 IEEE International Conference on Automation Science and Engineering
T2 - 2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012
Y2 - 20 August 2012 through 24 August 2012
ER -