Wet-etch texturing of ZnO:Ga back layer on superstrate-type microcrystalline silicon solar cells

Kuang Chieh Lai, Fu Ji Tsai, Jen Hung Wang, Chih Hung Yeh, Mau Phon Houng

Research output: Contribution to journalReview articlepeer-review

4 Citations (Scopus)


Surface wet etching is applied to the ZnO:Ga (GZO) back contact in μc-Si thin film solar cells. GZO transparency increases with increasing deposition substrate temperature. Texturing enhances reflective scattering, with etching around 56 s producing the best scattering, whereas etching around 5 s produces the best fabricated solar cells. Etching beyond these times produces suboptimal performance related to excessive erosion of the GZO. The best μc-Si solar cell achieves FF=68%, VOC=471 mV and JSC=21.48 mA/cm 2 (η=6.88%). Improvement is attributed to enhanced texture-induced scattering of light reflected back into the solar cell, increasing the efficiency of our lab-made single μc-Si solar cells from 6.54% to 6.88%. Improved external quantum efficiency is seen primarily in the longer wavelengths, i.e. 6001100 nm. However, variation of the fabrication conditions offers opportunity for significant tuning of the optical absorption spectrum.

Original languageEnglish
Pages (from-to)1583-1586
Number of pages4
JournalSolar Energy Materials and Solar Cells
Issue number7
Publication statusPublished - 2011 Jul

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films


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