TY - JOUR
T1 - Wide linear sensing sensors using ZnO:Ta extended-gate field-effect- transistors
AU - Chiu, Ying Shuo
AU - Lee, Ching Ting
AU - Lou, Li Ren
AU - Ho, Shu Ching
AU - Chuang, Chun Te
N1 - Funding Information:
This work was supported by the National Science Council, Taiwan, Republic of China under NSC-99-2221-E-006-208-MY3 and the Microsystems Technology Center, Industrial Technology Research Institute, Tainan, Taiwan, Republic of China .
PY - 2013
Y1 - 2013
N2 - To obtain wide linear pH sensing range, the tantalum doped zinc oxide (ZnO:Ta) thin film was deposited as the sensing membrane of extended-gate field-effect-transistor (EGFET) pH sensors using the vapor cooling condensation system. Compared with the ZnO EGFET pH sensors, the experimental results exhibited that the linear sensing pH range of the ZnO:Ta EGFET pH sensors was extended from the pH range of 4-12 to the pH range of 1.3-12. Furthermore, the ZnO:Ta pH sensors was stable in the whole extended pH range and showed favorable sensing sensitivity of 41.56 mV/pH. The AFM images of the ZnO:Ta sensing membrane after the measurement in strong acidic solution showed no observable surface damage, which further verified the high corrosion resistance of the ZnO:Ta sensing membrane.
AB - To obtain wide linear pH sensing range, the tantalum doped zinc oxide (ZnO:Ta) thin film was deposited as the sensing membrane of extended-gate field-effect-transistor (EGFET) pH sensors using the vapor cooling condensation system. Compared with the ZnO EGFET pH sensors, the experimental results exhibited that the linear sensing pH range of the ZnO:Ta EGFET pH sensors was extended from the pH range of 4-12 to the pH range of 1.3-12. Furthermore, the ZnO:Ta pH sensors was stable in the whole extended pH range and showed favorable sensing sensitivity of 41.56 mV/pH. The AFM images of the ZnO:Ta sensing membrane after the measurement in strong acidic solution showed no observable surface damage, which further verified the high corrosion resistance of the ZnO:Ta sensing membrane.
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U2 - 10.1016/j.snb.2013.07.107
DO - 10.1016/j.snb.2013.07.107
M3 - Article
AN - SCOPUS:84883257839
SN - 0925-4005
VL - 188
SP - 944
EP - 948
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
ER -