WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system

Chih Hung Lin, Shoou Jinn Chang, Ting Jen Hsueh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.

Original languageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages190-193
Number of pages4
ISBN (Electronic)9781509030590
DOIs
Publication statusPublished - 2017 Aug 25
Event12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States
Duration: 2017 Apr 92017 Apr 12

Publication series

Name2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Other

Other12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
CountryUnited States
CityLos Angeles
Period17-04-0917-04-12

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Lin, C. H., Chang, S. J., & Hsueh, T. J. (2017). WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 190-193). [8017003] (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2017.8017003