TY - GEN
T1 - WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system
AU - Lin, Chih Hung
AU - Chang, Shoou Jinn
AU - Hsueh, Ting Jen
N1 - Funding Information:
The authors would like to thank the National Science Council of the Republic of China, Taiwan, for financially supporting this research under Contract MOST 103 – 2221 – E -492 - 047 - MY3 and 104GE05.
Publisher Copyright:
© 2017 IEEE.
PY - 2017/8/25
Y1 - 2017/8/25
N2 - In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.
AB - In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley 2400 source meter. The good sensing response is optimum at temperature 150, and then optimum sensor exhibited remarkably high response from lower nitric oxide concentration were ∼10.34%, 19.7% and 29.06% for 50, 150 and 250 ppb, respectively.
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U2 - 10.1109/NEMS.2017.8017003
DO - 10.1109/NEMS.2017.8017003
M3 - Conference contribution
AN - SCOPUS:85030856149
T3 - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
SP - 190
EP - 193
BT - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Y2 - 9 April 2017 through 12 April 2017
ER -