X-ray absorption of Si-C-N thin films: A comparison between crystalline and amorphous phases

Y. K. Chang, H. H. Hsieh, W. F. Pong, M. H. Tsai, T. E. Dann, F. Z. Chien, P. K. Tseng, L. C. Chen, S. L. Wei, K. H. Chen, J. J. Wu, Y. F. Chen

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21 Citations (Scopus)

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Physics & Astronomy