X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si1-xGex/Si multilayers

Z. H. Ming, A. Krol, Y. L. Soo, Y. H. Kao, J. S. Park, K. L. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-x Gex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

Original languageEnglish
Title of host publicationEvolution of Surface and Thin Film Microstructure
EditorsHarry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
PublisherPubl by Materials Research Society
Pages261-264
Number of pages4
ISBN (Print)1558991751
Publication statusPublished - 1993
EventProceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: 1992 Nov 301992 Dec 4

Publication series

NameMaterials Research Society Symposium Proceedings
Volume280
ISSN (Print)0272-9172

Conference

ConferenceProceedings of the 1992 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period92-11-3092-12-04

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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