X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si1-xGex/Si multilayers

Z. H. Ming; A. Krol; Y. L. Soo; Y. H. Kao; J. S. Park; K. L. Wang

X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si_1-xGe_x/Si multilayers

Z. H. Ming, A. Krol, Y. L. Soo, Y. H. Kao, J. S. Park, K. L. Wang

College of Electrical Engineering and Computer Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si_1-xGe_x/Si and the inverted bilayer Si/Si_1-x Ge_x as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

Original language	English
Title of host publication	Evolution of Surface and Thin Film Microstructure
Editors	Harry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
Publisher	Publ by Materials Research Society
Pages	261-264
Number of pages	4
ISBN (Print)	1558991751
Publication status	Published - 1993
Event	Proceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA Duration: 1992 Nov 30 → 1992 Dec 4

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	280
ISSN (Print)	0272-9172

Conference

Conference	Proceedings of the 1992 Fall Meeting of the Materials Research Society
City	Boston, MA, USA
Period	92-11-30 → 92-12-04

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

Ming, Z. H., Krol, A., Soo, Y. L., Kao, Y. H., Park, J. S., & Wang, K. L. (1993). X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si_1-xGe_x/Si multilayers. In H. A. Atwater, E. Chason, M. H. Grabow, & M. G. Lagally (Eds.), Evolution of Surface and Thin Film Microstructure (pp. 261-264). (Materials Research Society Symposium Proceedings; Vol. 280). Publ by Materials Research Society.

Ming, Z. H. ; Krol, A. ; Soo, Y. L. et al. / X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si_1-xGe_x/Si multilayers. Evolution of Surface and Thin Film Microstructure. editor / Harry A. Atwater ; Eric Chason ; Marcia H. Grabow ; Max G. Lagally. Publ by Materials Research Society, 1993. pp. 261-264 (Materials Research Society Symposium Proceedings).

@inproceedings{e16e4696ec644829ab0da2c57982180a,

title = "X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si1-xGex/Si multilayers",

abstract = "Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-x Gex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.",

author = "Ming, {Z. H.} and A. Krol and Soo, {Y. L.} and Kao, {Y. H.} and Park, {J. S.} and Wang, {K. L.}",

year = "1993",

language = "English",

isbn = "1558991751",

series = "Materials Research Society Symposium Proceedings",

publisher = "Publ by Materials Research Society",

pages = "261--264",

editor = "Atwater, {Harry A.} and Eric Chason and Grabow, {Marcia H.} and Lagally, {Max G.}",

booktitle = "Evolution of Surface and Thin Film Microstructure",

note = "Proceedings of the 1992 Fall Meeting of the Materials Research Society ; Conference date: 30-11-1992 Through 04-12-1992",

}

Ming, ZH, Krol, A, Soo, YL, Kao, YH, Park, JS & Wang, KL 1993, X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si_1-xGe_x/Si multilayers. in HA Atwater, E Chason, MH Grabow & MG Lagally (eds), Evolution of Surface and Thin Film Microstructure. Materials Research Society Symposium Proceedings, vol. 280, Publ by Materials Research Society, pp. 261-264, Proceedings of the 1992 Fall Meeting of the Materials Research Society, Boston, MA, USA, 92-11-30.

X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si_1-xGe_x/Si multilayers. / Ming, Z. H.; Krol, A.; Soo, Y. L. et al.

Evolution of Surface and Thin Film Microstructure. ed. / Harry A. Atwater; Eric Chason; Marcia H. Grabow; Max G. Lagally. Publ by Materials Research Society, 1993. p. 261-264 (Materials Research Society Symposium Proceedings; Vol. 280).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si1-xGex/Si multilayers

AU - Ming, Z. H.

AU - Krol, A.

AU - Soo, Y. L.

AU - Kao, Y. H.

AU - Park, J. S.

AU - Wang, K. L.

PY - 1993

Y1 - 1993

N2 - Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-x Gex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

AB - Angular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-x Gex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

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M3 - Conference contribution

AN - SCOPUS:0027805107

SN - 1558991751

T3 - Materials Research Society Symposium Proceedings

SP - 261

EP - 264

BT - Evolution of Surface and Thin Film Microstructure

A2 - Atwater, Harry A.

A2 - Chason, Eric

A2 - Grabow, Marcia H.

A2 - Lagally, Max G.

PB - Publ by Materials Research Society

T2 - Proceedings of the 1992 Fall Meeting of the Materials Research Society

Y2 - 30 November 1992 through 4 December 1992

ER -

Ming ZH, Krol A, Soo YL, Kao YH, Park JS, Wang KL. X-ray grazing angle scattering and fluorescence studies of interfacial microstructures in Si_1-xGe_x/Si multilayers. In Atwater HA, Chason E, Grabow MH, Lagally MG, editors, Evolution of Surface and Thin Film Microstructure. Publ by Materials Research Society. 1993. p. 261-264. (Materials Research Society Symposium Proceedings).