X-ray photoelectron and X-ray absorption spectroscopic study on β-FeSi 2 thin films fabricated by ion beam sputter deposition

F. Esaka, H. Yamamoto, N. Matsubayashi, Y. Yamada, M. Sasase, K. Yamaguchi, S. Shamoto, M. Magara, T. Kimura

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

A combination of X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS) using synchrotron radiation is applied to clarify surface chemical states of β-FeSi 2 films fabricated by an ion-beam sputtering deposition method. The differences in the chemical states of the films fabricated at substrate temperatures of 873, 973 and 1173 K are investigated. For the film fabricated at 873 K, Si 2p XPS spectra indicate the formation of a relatively thicker SiO 2 layer. In addition, Fe L-edge XAS spectra exhibit the formation of FeSi 2-X by preferential oxidation of Si or the presence of unreacted Fe. The results for the film fabricated at 1173 K imply the existence of FeSi 2 with α and ε phases. In contrast, the results for the film fabricated at 973 K indicate the formation of relatively homogeneous β-FeSi 2 . These imply that the relatively excellent crystal property of the film fabricated at 973 K is due to the formation of homogeneous β-FeSi 2 . As a conclusion, the combination of XPS and XAS using synchrotron radiation is a powerful tool to elucidate the surface chemical states of thin films.

Original languageEnglish
Pages (from-to)3155-3159
Number of pages5
JournalApplied Surface Science
Volume256
Issue number10
DOIs
Publication statusPublished - 2010 Mar 1

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'X-ray photoelectron and X-ray absorption spectroscopic study on β-FeSi <sub>2</sub> thin films fabricated by ion beam sputter deposition'. Together they form a unique fingerprint.

Cite this