Zinc-oxide nanorod array fabricated by high temperature hydrothermal method applied to gas sensor

Wen-Dung Hsu, Jenn Kai Tsai, Jyun Yang Tang, Teen Hang Meen, Tian Chiuan Wu

Research output: Contribution to journalArticle

Abstract

Zinc oxide (ZnO) nanorod based gas sensor was successfully fabricated with interdigital electrode on silicon substrate. The highest sensitivity value is 5.24 at 600 ppm CO2 gas ambient. The influence of growth temperature of ZnO ranging from 90 to 190 °C by the high temperature hydrothermal method was investigated. The ZnO nanorod array were characterized by using field emission scanning electron microscopy (FE-SEM), photoluminescence spectroscopy, X-ray diffraction pattern. From FE-SEM results, the morphology of ZnO nanorods changes from hexagonal structure to sponge-like shape as the growth temperature increases. When the growth temperature is below 150 °C, hexagonal nanorod growth is observed. On the other hand, when the growth temperature is above 170 °C sheet growth is found. In the gas sensor measurements, it is found that ZnO nanorod grown at 150 °C has the best gas sensing performance due to its least intrinsic defects in this study.

Original languageEnglish
Pages (from-to)3957-3963
Number of pages7
JournalMicrosystem Technologies
Volume24
Issue number10
DOIs
Publication statusPublished - 2018 Oct 1

Fingerprint

Zinc Oxide
Zinc oxide
Chemical sensors
Nanorods
zinc oxides
nanorods
Growth temperature
sensors
gases
Field emission
Temperature
Gases
field emission
Scanning electron microscopy
Photoluminescence spectroscopy
Silicon
scanning electron microscopy
temperature
Diffraction patterns
diffraction patterns

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Hsu, Wen-Dung ; Tsai, Jenn Kai ; Tang, Jyun Yang ; Meen, Teen Hang ; Wu, Tian Chiuan. / Zinc-oxide nanorod array fabricated by high temperature hydrothermal method applied to gas sensor. In: Microsystem Technologies. 2018 ; Vol. 24, No. 10. pp. 3957-3963.
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Zinc-oxide nanorod array fabricated by high temperature hydrothermal method applied to gas sensor. / Hsu, Wen-Dung; Tsai, Jenn Kai; Tang, Jyun Yang; Meen, Teen Hang; Wu, Tian Chiuan.

In: Microsystem Technologies, Vol. 24, No. 10, 01.10.2018, p. 3957-3963.

Research output: Contribution to journalArticle

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