ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling

Tsu Chi Chang, Kuo Bin Hong, Ying Yu Lai, Yu Hsun Chou, Shing Chung Wang, Tien Chang Lu

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescence and photoluminescence spectra, the whispering gallery mode (WGM) was observed in different shaped microcavities. Up further increasing excitation, the lasing action was dominated by these WGMs and matched very well to the simulated results. Our experiment shows that ZnO microcavities with different shapes can be made with high quality by FIB milling for specific applications of microlight sources and optical devices.

Original languageEnglish
Article number319
JournalNanoscale Research Letters
Volume11
Issue number1
DOIs
Publication statusPublished - 2016 Dec 1

Fingerprint

Microcavities
Ion beams
ion beams
whispering gallery modes
Focused ion beams
cathodoluminescence
lasing
photoluminescence
Whispering gallery modes
cavities
fabrication
Cathodoluminescence
Optical devices
excitation
Photoluminescence
Fabrication
Experiments

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Chang, Tsu Chi ; Hong, Kuo Bin ; Lai, Ying Yu ; Chou, Yu Hsun ; Wang, Shing Chung ; Lu, Tien Chang. / ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling. In: Nanoscale Research Letters. 2016 ; Vol. 11, No. 1.
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ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling. / Chang, Tsu Chi; Hong, Kuo Bin; Lai, Ying Yu; Chou, Yu Hsun; Wang, Shing Chung; Lu, Tien Chang.

In: Nanoscale Research Letters, Vol. 11, No. 1, 319, 01.12.2016.

Research output: Contribution to journalArticle

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