ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling

Tsu Chi Chang, Kuo Bin Hong, Ying Yu Lai, Yu Hsun Chou, Shing Chung Wang, Tien Chang Lu

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescence and photoluminescence spectra, the whispering gallery mode (WGM) was observed in different shaped microcavities. Up further increasing excitation, the lasing action was dominated by these WGMs and matched very well to the simulated results. Our experiment shows that ZnO microcavities with different shapes can be made with high quality by FIB milling for specific applications of microlight sources and optical devices.

Original languageEnglish
Article number319
JournalNanoscale Research Letters
Issue number1
Publication statusPublished - 2016 Dec 1

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics


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