ZnO MSM photodetectors with Ru contact electrodes

T. K. Lin; S. J. Chang; Y. K. Su; B. R. Huang; M. Fujita; Y. Horikoshi

doi:10.1016/j.jcrysgro.2005.04.056

ZnO MSM photodetectors with Ru contact electrodes

T. K. Lin
, S. J. Chang
, Y. K. Su
, B. R. Huang
, M. Fujita
, Y. Horikoshi

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

85 Citations (Scopus)

Abstract

ZnO epitaxial films were grown on sapphire substrates by molecular beam epitaxy. Schottky diodes and metal-semiconductor-metal (MSM) photodetectors with ruthenium (Ru) electrodes were also fabricated. It was found that Schottky barrier height at the Ru/ZnO interface was 0.76 eV. It was also found that we achieved a photocurrent to dark current contrast ratio of 225 from our ZnO MSM photodetectors. Furthermore, it was found that the time constant of our photodetectors was 13 ms with three-order decay exponential function.

Original language	English
Pages (from-to)	513-517
Number of pages	5
Journal	Journal of Crystal Growth
Volume	281
Issue number	2-4
DOIs	https://doi.org/10.1016/j.jcrysgro.2005.04.056
Publication status	Published - 2005 Aug 1

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/j.jcrysgro.2005.04.056

Cite this

@article{f19193a38fc44514a88646f391bf5827,

title = "ZnO MSM photodetectors with Ru contact electrodes",

abstract = "ZnO epitaxial films were grown on sapphire substrates by molecular beam epitaxy. Schottky diodes and metal-semiconductor-metal (MSM) photodetectors with ruthenium (Ru) electrodes were also fabricated. It was found that Schottky barrier height at the Ru/ZnO interface was 0.76 eV. It was also found that we achieved a photocurrent to dark current contrast ratio of 225 from our ZnO MSM photodetectors. Furthermore, it was found that the time constant of our photodetectors was 13 ms with three-order decay exponential function.",

author = "Lin, \{T. K.\} and Chang, \{S. J.\} and Su, \{Y. K.\} and Huang, \{B. R.\} and M. Fujita and Y. Horikoshi",

note = "Funding Information: This work was supported by National Science Council under Contract number NSC-93-2623-7-006-003.",

year = "2005",

month = aug,

day = "1",

doi = "10.1016/j.jcrysgro.2005.04.056",

language = "English",

volume = "281",

pages = "513--517",

journal = "Journal of Crystal Growth",

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publisher = "Elsevier BV",

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TY - JOUR

T1 - ZnO MSM photodetectors with Ru contact electrodes

AU - Lin, T. K.

AU - Chang, S. J.

AU - Su, Y. K.

AU - Huang, B. R.

AU - Fujita, M.

AU - Horikoshi, Y.

N1 - Funding Information: This work was supported by National Science Council under Contract number NSC-93-2623-7-006-003.

PY - 2005/8/1

Y1 - 2005/8/1

N2 - ZnO epitaxial films were grown on sapphire substrates by molecular beam epitaxy. Schottky diodes and metal-semiconductor-metal (MSM) photodetectors with ruthenium (Ru) electrodes were also fabricated. It was found that Schottky barrier height at the Ru/ZnO interface was 0.76 eV. It was also found that we achieved a photocurrent to dark current contrast ratio of 225 from our ZnO MSM photodetectors. Furthermore, it was found that the time constant of our photodetectors was 13 ms with three-order decay exponential function.

AB - ZnO epitaxial films were grown on sapphire substrates by molecular beam epitaxy. Schottky diodes and metal-semiconductor-metal (MSM) photodetectors with ruthenium (Ru) electrodes were also fabricated. It was found that Schottky barrier height at the Ru/ZnO interface was 0.76 eV. It was also found that we achieved a photocurrent to dark current contrast ratio of 225 from our ZnO MSM photodetectors. Furthermore, it was found that the time constant of our photodetectors was 13 ms with three-order decay exponential function.

UR - https://www.scopus.com/pages/publications/22144498886

UR - https://www.scopus.com/pages/publications/22144498886#tab=citedBy

U2 - 10.1016/j.jcrysgro.2005.04.056

DO - 10.1016/j.jcrysgro.2005.04.056

M3 - Article

AN - SCOPUS:22144498886

SN - 0022-0248

VL - 281

SP - 513

EP - 517

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 2-4

ER -

ZnO MSM photodetectors with Ru contact electrodes

Abstract

All Science Journal Classification (ASJC) codes

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