ZnO Nanowire-Based Oxygen Gas Sensor

Chien Yuan Lu; Sheng Po Chang; Shoou Jinn Chang; Ting Jen Hsueh; Cheng Liang Hsu; Yu Zung Chiou; I. Cherng Chen

doi:10.1109/JSEN.2009.2014425

ZnO Nanowire-Based Oxygen Gas Sensor

Chien Yuan Lu, Sheng Po Chang, Shoou Jinn Chang, Ting Jen Hsueh, Cheng Liang Hsu, Yu Zung Chiou, I. Cherng Chen

Research output: Contribution to journal › Article › peer-review

62 Citations (Scopus)

Abstract

We report the growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small x-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.

Original language	English
Pages (from-to)	485-489
Number of pages	5
Journal	IEEE Sensors Journal
Volume	9
Issue number	4
DOIs	https://doi.org/10.1109/JSEN.2009.2014425
Publication status	Published - 2009 Apr

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

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@article{45e3086f9ff14580bb5b853461856923,

title = "ZnO Nanowire-Based Oxygen Gas Sensor",

abstract = "We report the growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small x-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.",

author = "Lu, {Chien Yuan} and Chang, {Sheng Po} and Chang, {Shoou Jinn} and Hsueh, {Ting Jen} and Hsu, {Cheng Liang} and Chiou, {Yu Zung} and Chen, {I. Cherng}",

note = "Funding Information: Manuscript received July 14, 2008; revised August 29, 2008; accepted September 03, 2008. Current version published March 04, 2009. This work was granted by the Center for Frontier Materials and Micro/Nano Science and Technology, National Cheng Kung University, Taiwan (D97-2700). This work was supported in part by the Advanced Optoelectronic Technology Center, National Cheng Kung University, under projects from the Ministry of Education. Personal use of this material is permitted. However, permission to use this material for any other purposes must be obtained from the IEEE by sending a request to [email protected]. The associate editor coordinating the review of this paper and approving it for publication was Prof. Ooi Kiang Tan.",

year = "2009",

month = apr,

doi = "10.1109/JSEN.2009.2014425",

language = "English",

volume = "9",

pages = "485--489",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4",

}

TY - JOUR

T1 - ZnO Nanowire-Based Oxygen Gas Sensor

AU - Lu, Chien Yuan

AU - Chang, Sheng Po

AU - Chang, Shoou Jinn

AU - Hsueh, Ting Jen

AU - Hsu, Cheng Liang

AU - Chiou, Yu Zung

AU - Chen, I. Cherng

N1 - Funding Information: Manuscript received July 14, 2008; revised August 29, 2008; accepted September 03, 2008. Current version published March 04, 2009. This work was granted by the Center for Frontier Materials and Micro/Nano Science and Technology, National Cheng Kung University, Taiwan (D97-2700). This work was supported in part by the Advanced Optoelectronic Technology Center, National Cheng Kung University, under projects from the Ministry of Education. Personal use of this material is permitted. However, permission to use this material for any other purposes must be obtained from the IEEE by sending a request to [email protected]. The associate editor coordinating the review of this paper and approving it for publication was Prof. Ooi Kiang Tan.

PY - 2009/4

Y1 - 2009/4

N2 - We report the growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small x-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.

AB - We report the growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small x-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.

UR - http://www.scopus.com/inward/record.url?scp=85008006429&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85008006429&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2009.2014425

DO - 10.1109/JSEN.2009.2014425

M3 - Article

AN - SCOPUS:85008006429

SN - 1530-437X

VL - 9

SP - 485

EP - 489

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 4

ER -

ZnO Nanowire-Based Oxygen Gas Sensor

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