ZnO:Al thin film gas sensor for detection of ethanol vapor

Shih Min Chou, Lay Gaik Teoh, Wei Hao Lai, Yen Hsun Su, Min Hsiung Hon

Research output: Contribution to journalArticlepeer-review

127 Citations (Scopus)


The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.

Original languageEnglish
Pages (from-to)1420-1427
Number of pages8
Issue number10
Publication statusPublished - 2006 Oct

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering


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