ZnO:Al thin film gas sensor for detection of ethanol vapor

Shih Min Chou; Lay Gaik Teoh; Wei Hao Lai; Yen Hsun Su; Min Hsiung Hon

doi:10.3390/s6101420

ZnO:Al thin film gas sensor for detection of ethanol vapor

Shih Min Chou, Lay Gaik Teoh, Wei Hao Lai, Yen Hsun Su, Min Hsiung Hon

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

132 Citations (Scopus)

Abstract

The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.

Original language	English
Pages (from-to)	1420-1427
Number of pages	8
Journal	Sensors
Volume	6
Issue number	10
DOIs	https://doi.org/10.3390/s6101420
Publication status	Published - 2006 Oct

All Science Journal Classification (ASJC) codes

Analytical Chemistry
Biochemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Electrical and Electronic Engineering

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10.3390/s6101420

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@article{24a8883b4eca440bb1612f00d3e2ded1,

title = "ZnO:Al thin film gas sensor for detection of ethanol vapor",

abstract = "The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.",

author = "Chou, {Shih Min} and Teoh, {Lay Gaik} and Lai, {Wei Hao} and Su, {Yen Hsun} and Hon, {Min Hsiung}",

year = "2006",

month = oct,

doi = "10.3390/s6101420",

language = "English",

volume = "6",

pages = "1420--1427",

journal = "Sensors",

issn = "1424-3210",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "10",

}

TY - JOUR

T1 - ZnO:Al thin film gas sensor for detection of ethanol vapor

AU - Chou, Shih Min

AU - Teoh, Lay Gaik

AU - Lai, Wei Hao

AU - Su, Yen Hsun

AU - Hon, Min Hsiung

PY - 2006/10

Y1 - 2006/10

N2 - The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.

AB - The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.

UR - http://www.scopus.com/inward/record.url?scp=33750720947&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33750720947&partnerID=8YFLogxK

U2 - 10.3390/s6101420

DO - 10.3390/s6101420

M3 - Article

AN - SCOPUS:33750720947

SN - 1424-3210

VL - 6

SP - 1420

EP - 1427

JO - Sensors

JF - Sensors

IS - 10

ER -

ZnO:Al thin film gas sensor for detection of ethanol vapor

Abstract

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