以共濺鍍技術開發鋯摻雜氧化銦鎵鋅通道層薄膜電晶體之研究

Translated title of the thesis: Improved Electrical Performance and Stability of Zr-IGZO Thin-Film Transistors with Zr0 85Si0 15O2 Gate Dielectric Using Co-sputtering Technique
  • 莊 智凱

Student thesis: Master's Thesis

Abstract

Date of Award2018 Aug 28
Original languageChinese
SupervisorShui-Jinn Wang (Supervisor)

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