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以共濺鍍技術開發鋯摻雜氧化銦鎵鋅通道層薄膜電晶體之研究
Translated title of the thesis
:
Improved Electrical Performance and Stability of Zr-IGZO Thin-Film Transistors with Zr0 85Si0 15O2 Gate Dielectric Using Co-sputtering Technique
莊 智凱
Student thesis
:
Master's Thesis
Abstract
Date of Award
2018 Aug 28
Original language
Chinese
Supervisor
Shui-Jinn Wang
(Supervisor)
Cite this
Standard
以共濺鍍技術開發鋯摻雜氧化銦鎵鋅通道層薄膜電晶體之研究
智凱, 莊. (Author).
2018 Aug 28
Student thesis
:
Master's Thesis