以共濺鍍技術開發鋯摻雜氧化銦鎵鋅通道層薄膜電晶體之研究

Translated title of the thesis: Improved Electrical Performance and Stability of Zr-IGZO Thin-Film Transistors with Zr0 85Si0 15O2 Gate Dielectric Using Co-sputtering Technique