以共濺鍍製備氧化鋁鋯介電層及鈦摻雜氧化銦鎵鋅通道層之薄膜電晶體

Translated title of the thesis: Fabrication of Thin-Film Transistors based on ZrAlO Gate Dielectrics and Ti-IGZO Channels by Co-sputtering Processes
  • 林 呈修

Student thesis: Master's Thesis

Abstract

Date of Award2018 Aug 28
Original languageChinese
SupervisorShui-Jinn Wang (Supervisor)

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